Modification of SRIM-calculated dose and injected ion profiles due to sputtering, injected ion buildup and void swelling

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ژورنال

عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

سال: 2016

ISSN: 0168-583X

DOI: 10.1016/j.nimb.2016.09.015